FP7 Regpot Metu-Mems Projects

MEMS Brokerage Event / 26-27 November 2013



Welcome to METU-MEMS

MEMS activities at METU have been started in 1995 within Electrical and Electronics Eng. Dept., and since then, a number of research projects have been conducted that are supported by various national and international institutions, including TUBITAK, State Planning Organization (DPT), MSB Ar-Ge, SSM, European Union 6th and 7th Framework Programmes, NATO SfS Programme, NSF, TOFAS, and Intel.


What is MEMS?

What is MEMS picture

MicroElectroMechanical Systems (MEMS) or Microsystems Technology is a rapidly growing, emerging technology, and it has a big potential to reshape life patterns in the future like the microelectronics technology. By utilizing this technology, it is possible to integrate both microelectronic circuits and mechanical structures on the same chip, enabling monolithic integration while reducing the microsystem size and cost considerably.


Center Organization and Infrastructure

centerpicture Currently there are 8 faculty members, 5 post-doctoral research fellows, more than 40 M.Sc. and Ph.D. students, and 26 technical personnel working in the Center. METU-MEMS Center has a microelectronics fabrication facility for 4", 6" and partially 8" wafer processing with a 1000 sq. meters of class 100 and class 1000 clean room area for fabrication and 300 sq. meters of class 10000 clean room area for electrical testing of IC's and active discrete components.